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http://hdl.handle.net/10773/6210
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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Alves, E. | pt |
dc.contributor.author | Liu, C. | pt |
dc.contributor.author | Lopes, E.B. | pt |
dc.contributor.author | Da Silva, M.F. | pt |
dc.contributor.author | Soares, J.C. | pt |
dc.contributor.author | Boemare, C. | pt |
dc.contributor.author | Soares, M.J. | pt |
dc.contributor.author | Monteiro, T. | pt |
dc.date.accessioned | 2012-02-10T15:04:44Z | - |
dc.date.issued | 2002 | - |
dc.identifier.issn | 0168-583X | pt |
dc.identifier.uri | http://hdl.handle.net/10773/6210 | - |
dc.description.abstract | Single crystalline GaN samples were implanted with several fluences of Ca ions at room temperature (RT) and 550 °C. The implantation at high temperature reduces significantly the damage. The measured minimum yield along the 〈0 0 0 1〉 axis in the implanted region increases from 15% to 40% when the substrate temperature during the implantation was changed from 550 °C and RT. The lattice site location was analysed simultaneously by measuring channeling effect on the backscattering particles and the particle-induced X-ray emission. Despite the different damage level, the regular fraction of Ca atoms in GaN lattice in both implantation conditions was roughly the same directly after the implantation (fs ∼ 50%), as indicated by the angular scans. Annealing at 1050 °C for 15 min in flowing N2 results in a significant recovery of the damage, but no changes were found for the Ca profile. The angular scans along the 〈0 0 0 1〉 and 〈1 0 1̄ 1〉 axial directions indicate that Ca is occupying mainly interstitial sites | pt |
dc.language.iso | eng | pt |
dc.publisher | Elsevier | pt |
dc.relation.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-0036568979&partnerID=40&md5=95fde0ecbc6b223afbec41f28567ea94 | |
dc.rights | restrictedAccess | por |
dc.subject | GaN | pt |
dc.subject | Lattice location | pt |
dc.subject | RBS/channeling | pt |
dc.title | Study of calcium implanted GaN | pt |
dc.type | article | pt |
dc.peerreviewed | yes | pt |
ua.distribution | international | pt |
degois.publication.firstPage | 625 | pt |
degois.publication.issue | 1-4 | |
degois.publication.lastPage | 629 | pt |
degois.publication.title | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | pt |
degois.publication.volume | 190 | pt |
dc.date.embargo | 10000-01-01 | - |
dc.identifier.doi | 10.1016/S0168-583X(01)01187-9 | * |
Appears in Collections: | DFis - Artigos |
Files in This Item:
File | Description | Size | Format | |
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NIMB.pdf | versão pdf do editor | 116.93 kB | Adobe PDF |
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