Please use this identifier to cite or link to this item:
http://hdl.handle.net/10773/6084
Title: | Structural and optical properties of nitrogen doped ZnO films |
Author: | Alves, E. Franco, N. Barradas, N.P. Munnik, F. Monteiro, T. Peres, M. Wang, J. Martins, R. Fortunato, E. |
Keywords: | ZnO films Nitrogen doping RF magnetron sputtering |
Issue Date: | 28-Mar-2009 |
Publisher: | Elsevier |
Abstract: | In this study we discuss the structural and optical properties of ZnO films doped with nitrogen, a potential p-type dopant. The films were deposited by magnetron sputtering using different conditions and substrates. The composition and structural properties of the films were studied combining X-ray diffraction (XRD), Rutherford backscattering (RBS), and heavy ion elastic recoil detection analysis (HI-ERDA). The results show an improvement of the quality of the films deposited on sapphire with increasing radio-frequency (RF) power with a preferentially growth along the c-axis. The ERDA analysis reveals the presence of H in the films and a homogeneous composition over the entire thickness. The photoluminescence of annealed samples evidences an improvement on the optical quality as identified by the well structured near band edge recombination. |
Description: | Partilhar documento na coleção da comunidade Laboratório Associado I3N |
Peer review: | yes |
URI: | http://hdl.handle.net/10773/6084 |
DOI: | 10.1016/j.vacuum.2009.03.022 |
ISSN: | 0042-207X |
Appears in Collections: | DFis - Artigos I3N-FSCOSD - Artigos |
Files in This Item:
File | Description | Size | Format | |
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Vacuum.pdf | versão pdf do editor | 550.92 kB | Adobe PDF |
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