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Issue Date | Title | Author(s) | Type | Access Type |
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2016 | Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system | Baudrillart, Benoit; Benedic, Fabien; Melouani, Amel S.; Oliveira, Filipe J.; Silva, Rui F.; Achard, Jocelyn | article |
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